Nano-Scale Fabrication Facilities at University of Texas at Austin

The key to the success of the proposed program lies in the access to facilities that are capable of fabricating and characterizing nano-scale structures. The Microelectronic Research Center (MRC) of University of Texas (UT) at Austin, along with 10 research centers, is a member of the National Science Foundation’s (NSF) National Nanotechnology Infrastructure Network (NNIN). Omega Optics Inc. is an active member of this fabrication facility. The fabrication facilities include 12,000 square feet of class 100 and 1000 cleanroom space with all equipment necessary to process the proposed devices. The equipment includes, in particular, mask aligners for photolithography, inductively coupled plasma reactive ion etching systems, chemical vapor deposition systems for thin-film dielectric deposition, electron beam lithography tool, metal evaporators, scanning electron microscope, and a rapid thermal annealing system. These facilities have already been used by the team to fabricate silicon photonic devices. A complete list of the available equipment can be found via